Aamop 20112012 20111102 series expansion in nonperturbative qed. Pdf electron cyclotron resonance ion sources and ecr plasmas. These ions are kept contained in the ion sources magnetic field, allowing highenergy electrons to strip additional electrons from the ions. Geller, electron cyclotron resonance ion sources and ecr plasmas inst. Moreover, these sources are also of fundamental interest for plasma physics, because of the very particular properties of the ecr plasma. The use of a quartz liner in the electron cyclotron resonance ecr ion source of atlas reduced the intensity of the interfering 39 k isobar background by a factor of. Palladino p360 usa calculations and experiments have been made on the ion cyclotron resonance phenomenon in a fully ionized gas. From a comparison of the measured data to numerical simulations, values of the electron. Electron cyclotron resonance ion sources and ecr plasmas by r geller and a great selection of related books, art and collectibles available now at. The ecr discharge is sustained in an rf electric field with static. Electron cyclotron resonance ecr ion sources are reliable and versatile producers of highly charged as well as intense beams of positive ions of many different species.
Microwave technology for the boost of performances in ecr ion. Modeling of electron cyclotron resonance ion source plasmas. Electron cyclotron resonance ion sources and ecr plasmas r. Model of chargestate distributions for electron cyclotron. In ecr plasma source, permanent magnets or solenoid coils are used to generate strong magnetic field. Electron cyclotron resonance plasma enhanced direct. The use of electron cyclotron resonance ecr ion sources for the production of intense beams of highly charged ions has immensely grown over the last decade.
Vondrasek, anl, argonne, il 604390, usa abstract a computer model for both electrons and multiple ion species in an electron cyclotron resonance ion source. The ecr ion sources allow the efficient use of rare isotopes of stable elements, either from natural or enriched sources. Some aspects of electron dynamics in electron cyclotron. Introduction electron cyclotron resonance ion sources ecris have been instrumental in the renaissance of nuclear physics since the 1970s 1. Field structure and electron life times in the mefisto. It was found that microwave breakdowns at pressures. Ions in these sources are created and extracted from a plasma produced by ecr discharge in a usually very strong bminimum type magnetic trap. The ecr surface should be closed and not touching the vacuum chamber walls to get the plasma electron temperature around 1 kev favorable for producing the.
At present there are roughly 33 ecr ion sources serving research cyclotrons at. Electron cyclotron resonance an overview sciencedirect topics. Electron cyclotron resonance plasma enhanced direct current. Direct thrust measurement of an electron cyclotron. Meyer, ornl, oak ridge, tn 378316372 usa abstract plasma potential measurements by use of a langmuir probe lp and an emissive probe ep were compared in the ornl caprice electron cyclotron resonance ecr ion source. Microwave technology for the boost of performances in ecr.
Several excellent books on ion sources exist, but, for the most part, bern hard wolf s book handbook of ion sources 1 has been used as the main source of information for this chapter. Ion behavior and gas mixing in electron cyclotron resonance plasmas as sources of highly charged ions g. Let me say from the start that opening this book on electron cyclotron resonance ion sources ecris and ecr plasmas is a real pleasure. Fullerenerare gas mixed plasmas in an electron cyclotron. The evident characteristic ion sputtering trident of hexapole con ned ecr sources has been identi ed with the. We have adopted gasmixing techniques in order to cool the plasma and then reduce fullerene dissociation. Transient effects in pulsed electron cyclotron resonance ecr plasmas are significant for applications such as.
Introduction to ecr processing due to their ability to produce high degrees of ionization at low gas pressures, electron cyclotron resonance ecr sources are being developed for downstream etching and deposition, and the production of radicals for surface treatment. Plasma diagnostics at electron cyclotron resonance ion. Physics of ecr electron cyclotron resonanceion sources. Electron cyclotron resonance ion sources and ecr plasmas. An example of this is the absolute volumetric emission rate of k. Several excellent books on ion sources exist, but, for the most part, bern hard wolf s book handbook of ion sources 1 has been used as. The book is written by a well known recognized expert in.
B kutner, calculating method for confinement time and charge distribution of ions in electron cyclotron resonance sources, rev sci instrum, vol. The electron cyclotron resonance ion sources ciavola and l. Electron cyclotron resonance ion source ecris 1 is a. Celona results and interpretation of high frequency experiments at 28 ghz in ecr ion sources, future prospects jan 1990 4042. Electron cyclotron resonance sources of multiply charged ions. May, 2004 electron cyclotron resonance ecr ion sources are scientific instruments particularly useful for physics. Usedon cyclotrons and synchrotrons for the production of hci beams. The use of electron cyclotron resonance ecr ion sources for the production of. All the free electrons will rotate with same frequency that can be calculated with the equation below. Simulation methods and programs published in journal of instrumentation as v. Since the early 1980s, following the awardwinning pioneering work done by dr. Doubleeinzellensextractionforthejyfl14ghz ecr ion source. Pdf electron cyclotron resonance ion sources physics.
Electron cyclotron resonance ecr ion sources ecris 1, 2 deliver variously charged ion beams for direct applications and, more frequently, highlycharged ions worldwide for high energy accelerators. Once the input microwave frequency matches the electron cyclotron frequency, a resonating effect will heat up the massive number of electrons. Tarvainen, double einzel lens extraction for the jyfl 14 ghz ecr ion source designed. The ions are eventually fed into the 88inch cyclotron for acceleration. The metallic vapors were achieved by plasma sputtering, using a microoven and. Ess bilbao, based in spain, are conducting a research project on this topic as part of a larger program associated with spallation neutron generation and accelerator technology. Electron cyclotron resonance ecr ion sources are used to produce intense, high charge state ion.
Electron and ion sources ion source ecr linac3 electron cyclotron resonance ion source ecr o for a given magnetic field, nonrelativistic electrons have a fixed revolution frequency. University of groningen extraction and transport of ion. Negative ion volume production in electron cyclotron. The spatial coupling of microwave radiation to the plasma is a concern. The authors have developed metallic ion beams in the energy range of a few kev to a few mev using a lowenergy ionbeam facility leibf consisting of a 10 ghz allpermanentmagnet electron cyclotron resonance ecr ion source placed on a highvoltage 200 kv platform. Us5370765a electron cyclotron resonance plasma source. Production and control of electron cyclotron resonance ecr plasmas for negative ion sources have been studied. University of groningen ion behavior and gas mixing in. The effects of substrate potentials on electron cyclotron. Electron cyclotron resonance sources of multiply charged. Microwaves were introduced in the plasma chambers from the cw generator via a vacuum window and the microwave transmission line. Ecr plasma research project for ion sources at ess bilbao. Ion sources positive ions, negative ions, electron cyclotron resonance ecr, electron beam ebis.
Chargestate distributions of metallic electron cyclotron. However, the yield was quite low, since most fullerene molecules were broken in the ecr plasma. A new 14 ghz electroncyclotronresonance ion source for the. The plasmas of electron cyclotron resonance ion sources ecriss are actively being studied using a variety of plasma diagnostics. Moreover, these sources are also of fundamental interest for plasma physics, because of the very particular properties of the ecr. Studies of electron cyclotron resonance ion source plasma physics by olli tarvainen academic disser tation for the degree of doctor of philosophy to be presented, by permission of the faculty of mathematics and science of the university of jyvaskyla, for public examination in auditorium fys1 of the university of jyvaskyla on decenber 16, 2005. In fact the scaling laws have anticipated the trend to higher frequency as that permit. Electron cyclotron resonance an overview sciencedirect. In fact the scaling laws have anticipated the trend to higher frequency as that permit to rise the plasma density and finally the.
Dec 14, 2007 the authors have developed metallic ion beams in the energy range of a few kev to a few mev using a lowenergy ion beam facility leibf consisting of a 10 ghz allpermanentmagnet electron cyclotron resonance ecr ion source placed on a highvoltage 200 kv platform. The role of microwave technology in ecr electron cyclotron resonance ion sources has recently became more relevant as the increase of ion charge states and beam currents is demanding for higher microwave frequency and higher injected power to heat the plasma. Reducing potassium contamination for ams detection of 39ar. Direct thrust measurements of an electron cyclotron resonance plasma thruster are performed with a thrust balance. For experiments that require intense beams of multiply charged ions in the cw mode, electron cyclotron resonance ecr ion sources are very commonly used. Characteristics of electron cyclotron resonance plasma sources.
Consequences of mode structure on plasma properties in. Electron cyclotron resonance plasmas were excited at a frequency of 2. A major step was made when geller transformed a large mirror device used for fusion plasma research. They use plasmas confined in a they use plasmas confined in a magnetic mirror device for ions to become multiply charged by impact ionization with ecr heated electrons. Electron cyclotron resonance ecr microwavebased plasma has been developed primarily for applications with reactive etching or deposition. Pdf let me say from the start that opening this book on electron cyclotron resonance ion sources ecris and ecr plasmas is a real. Electronbeam extraction system for the frankfurt 14 ghz. Circe, 1973 into an extremely successful ion source. A magnetic field is formed by magnets circumferentially arranged about a cylindrical and symmetrical chamber with microwave power injected perpendicularly to a longitudinal axis of.
University of groningen extraction and transport of ion beams. A method and apparatus are disclosed employing electron cyclotron resonant ecr heating to produce plasma for applications including but not limited to chemical vapor deposition and etching. Consequences of mode structure on plasma properties in electron cyclotron resonance sources ronald l. One is especially interested in this for directly heating the ions in a plasma.
Ecr ion sources are used as injectors into linear accelerators, vandegraaff generators or cyclotrons in nuclear and elementary particle physics. Numerical model of electron cyclotron resonance ion source i. Risefall times of pulses of highly charged ions of cd and mg were registered as a function of microwave power and gas pressure. The 88inch cyclotron is fed by three electron cyclotron resonance ecr highchargestate ion sources. Introduction electron cyclotron resonance ecr plasma sources devel oped for plasma processing technologies have received a great deal of interest in the past several years. Electron cyclotron resonance ion sources cern indico. Frequency scaling in ecr ion sources electron cyclotron resonance condition geller proposed scaling for ecr ion sources 1987 plasma density n e f2 based on the assumption n e electron cyclotron resonance ion sources and ecr plasmas geller, r acknowledged as the founding father of and world renowned expert on electron cyclotron resonance sources richard geller has produced a unique book devoted to the physics and technicalities of electron cyclotron resonance sources. At present there are roughly 33 ecr ion sources serving research cyclotrons at 22 facilities around the world 1. Electron and ion sources electrons thermionic emission therefore at high temperatures there is an electron cloud around the material. Nowadays, the most successful ions sources are probably the electron cyclotron resonant ion source ecris.
These ion sources are able to produce ions from virtually any element, they are easy to operate and have an excellent longterm stability as well as a very good reproducibility. Simulation of plasma confinement in an electron cyclotron. Insitu electron cyclotron resonance ecr plasma potential. The current density can then be found by integrating the available electrons and their energy. The behavior of compact electron cyclotron resonance ion sources ecris is emphasized in this article, and more specifically the caprice ecris concept. The ecr source is smaller than the cryebis, providing ions with lower mass and ultimate charge state, but with much greater beam current. They are widely used to produce ion beams for accelerators, atomic physics research and industrial applications.
A new production method using permanent magnets is proposed as one possibility for generating a largediameter highdensity uniform microwave plasma. Electron cyclotron resonance ecr ion sources are scientific instruments particularly useful for physics. A new 14 ghz electroncyclotronresonance ion source for. Frequency scaling in ecr ion sources electron cyclotron resonance condition geller proposed scaling for ecr ion sources 1987 plasma density n e f2 based on the assumption n e electron cyclotron resonance ion sources and ecr plasmas provides a primer on electron cyclotron phenomena in ion sources as well as being a reference to the field of ion source developments. Coverage includes elements of plasma physics, specific electron cyclotron resonance physics, and the relevant technology directed at both scientists and. These diagnostics have the potential to advance ecris development. Electron cyclotron resonance plasmas and electron cyclotron. Model of chargestate distributions for electron cyclotron resonance ion source plasmas. Electron cyclotron resonance ion sources and ecr plasmas geller, r acknowledged as the founding father of and world renowned expert on electron cyclotron resonance sources richard geller has produced a unique book devoted to the physics and technicalities of electron cyclotron resonance sources. It was found that microwave breakdowns at pressures 10. Electron cyclotron resonance ions sources ecris electron beam ion sources ebis electron beam ion traps ebit sources of highly charged ions. The electron cyclotron resonance source ecr is a plasma device designed to provide highlycharged ions at low velocities.